Symmetrical Coupling Multi-Cavity Bandpass Filter for CMOS Compatible Fluorescence Detection

Integration of functional components such as excitation light source, micro-fluidic chip, optical filters, and complementary metal–oxide–semiconductor (CMOS) sensors on a single photonics chip for fluorescence detection by advanced semiconductor process, is future technology rapid responding, high accuracy, handheld point-of-care diagnosis protocol in field application daily life. We designed CMOS compatible bandpass filter glass substrate based symmetrical coupling multi-cavity (SCMC) SiN/SiO 2 thin film stacker aimed at 5-carboxylfluorescein (5-FAM), commonly used probe biotechnology medicine diagnosis. The calculation transfer matrix method (TMM) 2D finite difference time domain (FDTD) algorithm, revealed that there was an optimized number cavities the SCMC stacker, transmittance pass band decreasing with increment while density stop improving it. For 10 resonant cavities, both TMM FDTD calculation, figured out emission remained source should be directed to incident angle less than 18° good passing centered 520 nm blocking wavelength 488 nm. It provided new insights design fabrication micro-lens array micro-apertures highly integrated chip.